Increased complexity of today´s applications requires high-resolution structural and chemical analysis of nanometer-scaled structures. The integral combination of different analysis technologies is the key to gain complementary information of the very same sample area.
This goal is ideally achieved with the goniometer-mounted MULTISCAN STM, integrated into the MULTISCAN LAB™ UHV system. To enable simultaneous and ultimate performance SEM/SAM/SPM operation, an extremely stable and compact SPM is utilised. The SPM stage is mounted onto a goniometer for optimal signal efficiency together with other detectors such as the NanoSAM analyser for ultimate SAM resolution or SEMPA (Scanning Electron Microscopy with Polarisation Analysis) and many others. The SPM can be operated under any rotation angle.
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MULTISCAN Stage with UHV Gemini Column and NanoSAM energy analyser.
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The SPM scanner fits into the small gap between sample and SEM column with 8 mm working distance. Although the scanner is ultra compact, it offers a scan range of 6 x 6 x 1.5 µm in XYZ, while meeting all stability criteria of a state-of-the-art SPM with atomic resolution on metals. Moreover, the rigid design also enables the use of a spring loaded sensor exchange with a non-magnetic tip carrier, avoiding magnetic stray fields for unsurpassed low energy SEM performance with the UHV Gemini.
The STM stage employs Omicron´s proven SPM technology with 3D tip coarse positioning to allow for multi-technique surface analysis of the very same sample area. The sample stage features XY lateral coarse positioning for locating the area of interest. Vertical Z sample coarse positioning in the room temperature version ensures constant SEM working distances for different sample thicknesses on standard sample plates. The variable temperature version ensures a constant SEM working distance by a dedicated VT sample plate design (no Z coarse positioning). The MULTISCAN STM VT features sample heating and cooling during SEM, SAM and atomically resolved STM. Temperature dependent processes can be analysed at variable temperatures ranging from 60 K up to 1000 K.
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a) Side view of the MULTISCAN STM with UHV Gemini Column and NanoSAM energy analyser
b) Frontview
c) Frontview with 25° tilted MULTISCAN STM.
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This makes the new MULTISCAN STM an ideal partner for the UHV Gemini Column. The low beam energy performance and ultimate resolution below 3 nm offers unsurpassed SEM capabilities and makes SPM work efficiently with SEM assisted probe navigation. Chemical analysis is pushed to previously unknown limits by the introduction of the NanoSAM energy analyser, enabling Scanning Auger Microscopy resolution below the 10 nm benchmark.
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