PEEM/µNEXAFS: Multicrystalline Silicon (mcSi)
  • Grain boundaries on mcSi are visible in the PEEM-image.
  • Precipitates of K and Ca are identified from the K and Ca 2p absorption edges on sample section 1 (see inset)


Reference: P. Hoffmann1 , D. Schmeißer 1 , D. R. Batchelor1 , M. Kittler2 , R. Follath 3 , W. Braun 3
1 BTU Cottbus; Angewandte Physik/ Sensorik
2 IHP (Institut für Halbleiterphysik); Frankfurt (Oder)
3 BESSY GmbH; Berlin

 
This result has been obtained with :
FOCUS PEEM with MICROANALYSER

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PEEM
PEEM/ µPES: Multicrystalline Silicon (mcSi) PEEM/ µPES: Multicrystalline Silicon (mcSi)
PEEM/µNEXAFS: Multicrystalline Silicon (mcSi) PEEM/µNEXAFS: Multicrystalline Silicon (mcSi)
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