Imaging XPS with 650 nm Resolution
(Result of the month 01/2007)

The first NanoESCA Imaging XPS spectrometer has successfully been installed at LETI* of CEA in Grenoble, on the MINATEC Campus. Initial results achieved both at the synchrotron and with the AlKα laboratory X-ray source far exceeded expectations**.

Bonding state XPS image of Te3d5/2 core level electrons in Te-O (green) and Te-Cd (blue). The gold distribution Au4f7/2 is shown in red.
Excitation with Alkα small spot monochromator, 1486 eV. Sample: 5 nm gold on poly CdTe, patterned by a FIB (Ga2+).
Elemental XPS image showing the Au distribution with world record lateral resolution of 612 nm.


* Laboratoire d'Electronique et de Technologies de l'Information.
**Thanks go out to everybody involved in this project, espacially to Olivier Renault and Nick Barrett.

 
This result has been obtained with :
NanoESCA

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